On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse
Tao Tang,Yansheng Hao,Yigang Shen,Yo Tanaka,Ming Huang,Yoichiroh Hosokawa,Ming Li,Yaxiaer Yalikun,Tao Tang,Yansheng Hao,Yigang Shen,Yo Tanaka,Ming Huang,Yoichiroh Hosokawa,Ming Li,Yaxiaer Yalikun
Under the excitation of acoustic radiation, the amount of energy absorbed and rebounded by cells have the relationship with mechanical properties, e.g. stiffness, shape, weight and so on. In this paper, a femtosecond laser-activated micro-detector is designed to convert this relationship into an electrical signal. First, the acoustic radiation is generated by a femtosecond laser pulse in a microch...
