A Micro-Robotic Approach for The Correction of Angular Deviations in AFM Samples From Generic Topographic Data

Freddy Romero Leiro,Ali Bazaei,Stéphane Régnier,Mokrane Boudaoud,Freddy Romero Leiro,Ali Bazaei,Stéphane Régnier,Mokrane Boudaoud

This article proposes a method for the correction of angular deviations caused during the fixing process of samples prepared for Atomic Force Microscopy (AFM). The correction is done using the angular control of a 6-DOF PPPS parallel platform were the sample is placed, while the AFM scan is performed by a 3-DOF serial cartesian robot with a tuning fork probe designed to perform FM-AFM. The method ...