Design and Control of a Large-Range Nil-Stiffness Electro-Magnetic Active Force Sensor

Jonathan Cailliez,Antoine Weill-Duflos,Mokrane Boudaoud,Stéphane Régnier,Sinan Haliyo,Jonathan Cailliez,Antoine Weill-Duflos,Mokrane Boudaoud,Stéphane Régnier,Sinan Haliyo

Active force sensors are key instruments to get around the tradeoff between the sensitivity and the measurement range of conventional passive force sensors. Thanks to their quasi-infinite stiffness in closed loop, active sensors can be applied for force measurements on samples with a wide range of stiffness without interference with the mechanical parameters of the sensor. MEMS (Micro-Electro Mech...