Design and Testing of a Flexure-Based XYZ Micropositioner with High Space-Utilization Efficiency
Zekui Lyu,Qingsong Xu,Zekui Lyu,Qingsong Xu
The flexure-based XYZ micropositioner with hybrid configuration has become more prevalent due to the characteristics of less mechanism decoupling and high motion precision. However, traditional mechanism design suffers from a large plane occupation with Z stage stacking, which leads to a low space-utilization efficiency. To address this issue, a novel conceptual design is proposed in this paper by...
