Motion Orchestration in Dual-Stage Wafer Scanners
Yazan M. Al-Rawashdeh,Marcel Heertjes,Mohammad Al Janaideh,Yazan M. Al-Rawashdeh,Marcel Heertjes,Mohammad Al Janaideh
In semiconductor manufacturing, lithography machines are becoming more and more sophisticated system of systems. As an example, a TWINSCAN wafer scanner machine is composed of a wafer, and reticle handlers, reticle, optics, and two wafer chains or systems. In previous studies, we covered the interactions between the reticle, optics, and wafer chains during the step-and-scan cycle. In this study, w...
