Precise 3D Calibration of Wafer Handling Robot by Visual Detection and Tracking of Elliptic-shape Wafers
Zining Wang,Masayoshi Tomizuka,Zining Wang,Masayoshi Tomizuka
This work provides a framework for the 3D calibration of wafers and a wafer handling robot by monocular vision. The proposed method precisely reconstructs the 3D poses of wafers from a set of images captured by the camera mounted on the robot. In addition, it calibrates the robot kinematics simultaneously. A robust ellipse detection and tracking algorithm based on the edge arcs is developed to rec...
