Using Piezoceramic-Actuated Stages in Precision Long-Stroke Motion Systems: A Design Procedure
Yazan M. Al-Rawashdeh,Mohammad Al Saaideh,Mohammad Al Janaideh,Yazan M. Al-Rawashdeh,Mohammad Al Saaideh,Mohammad Al Janaideh
Mainly, the integration of fine positioning piezo-actuated stages in precision motion systems is considered, which results in multi-stage configurations. Mostly, in such configurations, the fine stages are attached to the coarse positioning stages- that do not meet required precision- by mechanical means. Once the motion is synchronized, the fine stages enhance the overall precision of the multi-s...
