Model-Free Control of a Class of High-Precision Scanning Motion Systems with Piezoceramic Actuators

Yazan M. Al-Rawashdeh,Mohammad Al Saaideh,Marcel F. Heertjes,Mohammad Al Janaideh,Yazan M. Al-Rawashdeh,Mohammad Al Saaideh,Marcel F. Heertjes,Mohammad Al Janaideh

To enhance the precision of coarse long-stroke motion axes, complementary short-stroke fine positioning stages are usually introduced. Being mechanically attached, the motion of the combined positioning stages needs to be controlled and synchronized. Therefore, typically suitable model-based controllers of fine stages are designed according to the sophisticated models and identification techniques...